Tube Type : Sealed Type
Inspection Resolution Max : 1µm
Field of View : 2×2 ~ 45×45 (mm)
Max. Tube Voltage : 90kV, 110kV, 130kV
Max. Tube Current : 250uA
Power : 25W
Detector : Flat Panel Detector
Flat Panel Detector : 5 inch
Resolution : 6.9 Megapixels
Table Size (mm) : 500 x 500mm
Axis : Standard: 4axis (X, Y, Z, Tilt)
Stroke (mm) : X: 500 / Y: 500 / Z:200
Max. Sample Loading (Kg) : 5kg
Tilt (°) : 55 °